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{{DISPLAYTITLE:microQ — Queensland Nanofabrication Facility}}


{{Hatnote|This is an internal knowledge base for the microQ nanofabrication facility at The University of Queensland. It is not a Wikipedia article.}}

{| style="width:100%; border:2px solid #1a3557; border-radius:6px; background:#f0f4f8; padding:1em; margin-bottom:1.5em;"
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| style="font-size:1.6em; font-weight:bold; color:#1a3557; padding-bottom:0.2em;" | microQ — Queensland Nanofabrication Facility
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| style="color:#444; font-size:0.95em;" | A shared user facility at The University of Queensland providing access to state-of-the-art micro and nanofabrication tools, cleanroom infrastructure, and expert support for researchers across engineering, physics, chemistry, and the life sciences.
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== About This Wiki ==

This wiki is the central knowledge base for microQ users. Here you will find everything you need to plan, book, and execute your fabrication projects — from understanding which tools are available, to step-by-step process workflows, standard operating procedures, and upcoming training events.

If you are new to the facility, start with the [[User:YOURUSERNAME/sandbox/Booking|Booking Guide]] to understand how to get access, then browse the [[User:YOURUSERNAME/sandbox/Workflows|Process Workflows]] to see how your device type maps to our available tools.

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== Our Purpose ==

microQ exists to make micro and nanofabrication accessible to the broadest possible research community at UQ and beyond. Our mission is to:

* Provide open access to cutting-edge fabrication and characterisation equipment
* Support researchers with expert technical staff and detailed process documentation
* Foster collaboration across disciplines and institutions
* Train the next generation of micro and nanofabrication scientists and engineers

Whether you are fabricating MEMS sensors, photonic integrated circuits, quantum devices, microfluidic chips, or organic electronics, microQ has the tools and expertise to support your work.

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== Location and Facilities ==

microQ infrastructure is distributed across several UQ sites. Each site specialises in different process capabilities.

{| class="wikitable" style="width:100%;"
! Site !! Building !! Campus !! Specialisation
|-
| '''ANFF-Q''' || AIBN (Bldg #75) || St Lucia || Lithography, deposition, etching, characterisation
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| '''CMM''' || Hawken (Bldg #50) || St Lucia || Electron beam lithography, electron microscopy, surface analysis
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| '''SMP''' || Parnell (Bldg #7) || St Lucia || Superconducting device fabrication, low-temperature deposition
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| '''Long Pocket''' || Pandanus (Bldg #1022) || Long Pocket || Soft lithography, microfluidics, oxidation furnace
|-
| '''COPE''' || SCMB || St Lucia || Organic electronics, OLEDs, perovskite devices
|}

== Create [[User:YOURUSERNAME/sandbox/Booking|Access Guide!!!]].==

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== Quick Navigation ==

The sections below give a brief overview of each knowledge area. Click the link to go to the full subpage.

{| style="width:100%; background-color:#fafafa;" cellpadding="8"
|- style="background-color:#d4e6f1;"
! Equipment Info
! Process Flow
! Recipes + Processes
! Data + Info
! Other Links:
|-
| style="background-color:#fef9e7;" |
* [[Lithography]]
* [[Deposition]]
* [[Dry Etch]]
* [[Wet Process]]
* [[Metrology]]
| style="background-color:#f4ebff;" |
* [[Bio-MEMS]]
* [[Photonics]]
* [[MEMS]]
* [[Quantum Devices]]
* [[Organic / OLED]]
| style="background-color:#eafaf1;" |
* [[Lithography (Recipes)|Lithography]]
* [[Deposition]]
* [[Dry Etch]]
|
* [[Process Control Data]]
* [[Tutorials]]
| style="background-color:#fafbe5;" |
* [https://anff-qld.org.au/ ANFF]
* [https://cmm.centre.uq.edu.au/ CMM]
|}

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=== Events, Workshops & Forums ===

[[File:Flyer2026_4p3.png|thumb|center|500px|Flyer 2026]]

Upcoming training workshops, user forums, facility open days, and short courses. This page also archives past event materials including presentation slides and tutorial notes.

'''→ [[Go to Events & Workshops]]''' <span style="color:#888;">''(coming soon)''</span>
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{| style="background-color:#8cd9b3; width:100%; padding:8px; border:1px solid #c3e6cb;"
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| '''News & Announcements'''
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''News from [µQ].''

=== µQ Wikipedia ===
It is with great pleasure that we announce the official launch of our internal Wiki platform. Through the hard work of our team and key assistance from ITS, we have successfully established a self-hosted MediaWiki instance at UQ. Enjoy exploring the page and utilizing these centralized resources!

// [[User:YourUsername|Fernando Gottardo]] 13:35, 26 October 2026 (CEST)
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== Contact ==

{| class="wikitable"
! Role !! Contact
|-
| General enquiries || microq@uq.edu.au
|-
| ANFF-Q instruments || anff@uq.edu.au
|-
| EBL / CMM || cmm@uq.edu.au
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| Organic / OLED (COPE) || Contact SCMB
|}

For urgent facility issues during operating hours, contact the relevant site directly.

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== How to Contribute to This Wiki ==

This wiki is maintained by microQ staff and trained users. If you would like to contribute a workflow, add an SOP, or correct an error:

# Create or log in to your Wikipedia account
# Navigate to the relevant subpage
# Click '''Edit''' and make your changes
# Add a brief summary of your edit in the Edit summary box
# Click '''Publish changes'''

For major additions or structural changes, please discuss with microQ staff first.

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CMM Wiki - User contributions [en]

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