Fernando.Gottardo1: Created page with "The following are various tutorials from our Wiki, collected here for your convenience. === General === * Need a service - Ordering procedure - see this page for how to submit your order into the system. * Tutorial - How Photomasks are Made - this will give you a better understanding of a photomask and clear up common misconceptions. === Direct-Write === Caption here * MLA150 - Design Guidelines - Direct-writer sys..."

2026-10-25T23:12:48Z

Created page with "The following are various tutorials from our Wiki, collected here for your convenience. === General === * Need a service - Ordering procedure - see this page for how to submit your order into the system. * Tutorial - How Photomasks are Made - this will give you a better understanding of a photomask and clear up common misconceptions. === Direct-Write === right|400px|Caption here * MLA150 - Design Guidelines - Direct-writer sys..."

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The following are various tutorials from our Wiki, collected here for your convenience.

=== General ===

* [[Need a service - Ordering procedure]] - see this page for how to submit your order into the system.
* [[Tutorial - How Photomasks are Made]] - this will give you a better understanding of a photomask and clear up common misconceptions.

=== Direct-Write ===

[[File:MLA150-png-png.webp|right|400px|Caption here]]
* [[MLA150 - Design Guidelines]] - Direct-writer system for structures with more than 1 um precision. Faster than EBPG5150 but less precise.
* [[EBPG5150 - Design Guidelines]] - Direct-writer system for structures with more than 5 nm precision. Slower than MLA150 but more precise.

== Lithography Tutorials ==

* [[MLA150 Lithography Configuration]] - Analyzing a De-focus / Exposure / Dose / Laser Wavelength/Gray-Scale - litho systems require tool configuration/calibration.
* [[EBPG Lithography Configuration]] - Analyzing a Current + Beam Spot Size + Beam Step Size/ Exposure / Dose / Gray-Scale - litho systems require tool configuration.

=== Alignment Markers ===

* [[MLA Alignment Markers]] - How to use MLA aligment markers according to your layout.
* [[EBPG Alignment Markers]] - How to use EBPG5150 aligment markers according to your layout.
[[File:Example GDS Design 2.png|thumb|right|300px|Example of .GDS layout]]

== Fabrication Tracking and Process Design ==

Designing experiments, tracking your fabrication steps/process improvements, and keeping track of your results are key to achieving repeatable and improved results!

'''[[Processing - Experiment Setup]]'''

Tutorials - Revision history