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microQ — Queensland Nanofabrication Facility

A shared user facility at The University of Queensland providing access to state-of-the-art micro and nanofabrication tools, cleanroom infrastructure, and expert support for researchers across engineering, physics, chemistry, and the life sciences.

About This Wiki

This wiki is the central knowledge base for microQ users. Here you will find everything you need to plan, book, and execute your fabrication projects — from understanding which tools are available, to step-by-step process workflows, standard operating procedures, and upcoming training events.

If you are new to the facility, start with the Booking Guide to understand how to get access, then browse the Process Workflows to see how your device type maps to our available tools.

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Our Purpose

microQ exists to make micro and nanofabrication accessible to the broadest possible research community at UQ and beyond. Our mission is to:

• Provide open access to cutting-edge fabrication and characterisation equipment
• Support researchers with expert technical staff and detailed process documentation
• Foster collaboration across disciplines and institutions
• Train the next generation of micro and nanofabrication scientists and engineers

Whether you are fabricating MEMS sensors, photonic integrated circuits, quantum devices, microfluidic chips, or organic electronics, microQ has the tools and expertise to support your work.

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History

microQ grew out of the Australian National Fabrication Facility Queensland Node (ANFF-Q), established as part of the national ANFF network to provide shared fabrication infrastructure to Australian researchers. Over time the facility expanded its scope, tools, and user base, becoming a hub for collaborative nanofabrication research across UQ's faculties and partner institutions.

Today microQ operates cleanroom spaces across multiple UQ campuses, housing tools for lithography, deposition, etching, characterisation, and more.

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Location and Facilities

microQ infrastructure is distributed across several UQ sites. Each site specialises in different process capabilities.

Site	Building	Campus	Specialisation
ANFF-Q	AIBN (Bldg #75)	St Lucia	Lithography, deposition, etching, characterisation
CMM	Hawken (Bldg #50)	St Lucia	Electron beam lithography, electron microscopy, surface analysis
SMP	Parnell (Bldg #7)	St Lucia	Superconducting device fabrication, low-temperature deposition
Long Pocket	Pandanus (Bldg #1022)	Long Pocket	Soft lithography, microfluidics, oxidation furnace
COPE	SCMB	St Lucia	Organic electronics, OLEDs, perovskite devices

All sites operate under cleanroom conditions. Access requirements vary by site — see the Booking Guide for details.

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Quick Navigation

The sections below give a brief overview of each knowledge area. Click the link to go to the full subpage.

Process Workflows

Step-by-step fabrication guides organised by device type. Each workflow shows the recommended sequence of tools and facilities, typical process parameters, and tips for common pitfalls. Currently covers:

• Bio-MEMS — microfluidics, PDMS soft lithography, hot embossing, bio-optomechanical devices
• Photonics — silicon photonics, metalenses, plasmonic nanostructures
• MEMS — cantilevers, bulk Si micromachining, surface micromachining
• Quantum devices — transmon qubits, superconducting resonators
• Organic / OLED — small-molecule OLEDs, perovskite solar cells

→ Go to Process Workflows

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Equipment

Full catalogue of instruments available at microQ, organised by process category. Each entry includes a description, key specifications, available materials, substrate sizes, and contact information for the responsible staff member. Categories include:

• Deposition — e-beam evaporation, sputtering, ALD, oxidation furnace
• Etching — DRIE, RIE, XeF₂ etcher
• Lithography — mask aligner, maskless aligner, hot embosser, Nanoscribe, MPO100

→ Go to Equipment (coming soon)

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Standard Operating Procedures

Detailed step-by-step operating procedures for each instrument, written for trained users. SOPs cover safety requirements, startup and shutdown sequences, process parameters, and troubleshooting guides. All users must read the relevant SOP before operating any tool independently.

→ Go to Standard Operating Procedures (coming soon)

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Booking Guide

Everything you need to know about getting access to microQ tools. This includes how to create a RIMS account, complete induction training, request tool access, book time slots, and understand fair-use and billing policies.

→ Go to Booking Guide (coming soon)

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Events, Workshops & Forums

Upcoming training workshops, user forums, facility open days, and short courses. This page also archives past event materials including presentation slides and tutorial notes.

→ Go to Events & Workshops (coming soon)

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Contact

Role	Contact
General enquiries	microq@uq.edu.au
ANFF-Q instruments	Kai-Yu Liu
EBL / CMM	Contact CMM directly via RIMS
Organic / OLED (COPE)	Contact SCMB

For urgent facility issues during operating hours, contact the relevant site directly.

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How to Contribute to This Wiki

This wiki is maintained by microQ staff and trained users. If you would like to contribute a workflow, add an SOP, or correct an error:

1. Create or log in to your Wikipedia account
2. Navigate to the relevant subpage (e.g. User:YOURUSERNAME/sandbox/Workflows)
3. Click Edit and make your changes
4. Add a brief summary of your edit in the Edit summary box
5. Click Publish changes

For major additions or structural changes, please discuss with microQ staff first.

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