Tutorials
From CMM Wiki
The following are various tutorials from our Wiki, collected here for your convenience.
General
- Need a service - Ordering procedure - see this page for how to submit your order into the system.
- Tutorial - How Photomasks are Made - this will give you a better understanding of a photomask and clear up common misconceptions.
Direct-Write
- MLA150 - Design Guidelines - Direct-writer system for structures with more than 1 um precision. Faster than EBPG5150 but less precise.
- EBPG5150 - Design Guidelines - Direct-writer system for structures with more than 5 nm precision. Slower than MLA150 but more precise.
Lithography Tutorials
- MLA150 Lithography Configuration - Analyzing a De-focus / Exposure / Dose / Laser Wavelength/Gray-Scale - litho systems require tool configuration/calibration.
- EBPG Lithography Configuration - Analyzing a Current + Beam Spot Size + Beam Step Size/ Exposure / Dose / Gray-Scale - litho systems require tool configuration.
Alignment Markers
- MLA Alignment Markers - How to use MLA aligment markers according to your layout.
- EBPG Alignment Markers - How to use EBPG5150 aligment markers according to your layout.
Fabrication Tracking and Process Design
Designing experiments, tracking your fabrication steps/process improvements, and keeping track of your results are key to achieving repeatable and improved results!
