Process Control Data: Revision history

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26 October 2026

  • curprev 09:1209:12, 26 October 2026 Fernando.Gottardo1 talk contribs 1,961 bytes +1,961 Created page with "= Etching (Process Control Data) = Process Control data for varius dry etching recipes and tools in the lab. == ICP RIE - Process Control == === Si Etching === We have found that Si etching is fairly sensitive to chamber condition. * [https://docs.google.com/spreadsheets/d/1Gwpl0NEzoSiHtOgeUIAUJxsTbUqey-GvSEwSgSBCPIo/edit?gid=0#gid=0| ICP RIE - Si etch data] * [https://docs.google.com/spreadsheets/d/1Gwpl0NEzoSiHtOgeUIAUJxsTbUqey-GvSEwSgSBCPIo/edit?gid=1129004670#gi..."
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