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<strong>MediaWiki has been installed.</strong>
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{{DISPLAYTITLE:microQ — Queensland Nanofabrication Facility}}
{{DISPLAYTITLE:microQ — Queensland Nanofabrication Facility}}
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| style="color:#444; font-size:0.95em;" | A shared user facility at The University of Queensland providing access to state-of-the-art micro and nanofabrication tools, cleanroom infrastructure, and expert support for researchers across engineering, physics, chemistry, and the life sciences.
| style="color:#444; font-size:0.95em;" | A shared user facility at The University of Queensland providing access to state-of-the-art micro and nanofabrication tools, cleanroom infrastructure, and expert support for researchers across engineering, physics, chemistry, and the life sciences.
|}
|}
__TOC__
__TOC__


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Whether you are fabricating MEMS sensors, photonic integrated circuits, quantum devices, microfluidic chips, or organic electronics, microQ has the tools and expertise to support your work.
Whether you are fabricating MEMS sensors, photonic integrated circuits, quantum devices, microfluidic chips, or organic electronics, microQ has the tools and expertise to support your work.
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== History ==
microQ grew out of the Australian National Fabrication Facility Queensland Node (ANFF-Q), established as part of the national ANFF network to provide shared fabrication infrastructure to Australian researchers. Over time the facility expanded its scope, tools, and user base, becoming a hub for collaborative nanofabrication research across UQ's faculties and partner institutions.
Today microQ operates cleanroom spaces across multiple UQ campuses, housing tools for lithography, deposition, etching, characterisation, and more.


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All sites operate under cleanroom conditions. Access requirements vary by site — see the [[User:YOURUSERNAME/sandbox/Booking|Booking Guide]] for details.
== Create [[User:YOURUSERNAME/sandbox/Booking|Access Guide!!!]].==
 


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The sections below give a brief overview of each knowledge area. Click the link to go to the full subpage.
The sections below give a brief overview of each knowledge area. Click the link to go to the full subpage.


=== [[User:YOURUSERNAME/sandbox/Workflows|Process Workflows]] ===
{| style="width:100%; background-color:#fafafa;" cellpadding="8"
 
|- style="background-color:#d4e6f1;"
Step-by-step fabrication guides organised by device type. Each workflow shows the recommended sequence of tools and facilities, typical process parameters, and tips for common pitfalls. Currently covers:
! Equipment Info
 
! Process Flow
* Bio-MEMS — microfluidics, PDMS soft lithography, hot embossing, bio-optomechanical devices
! Recipes + Processes
* Photonics — silicon photonics, metalenses, plasmonic nanostructures
! Data + Info
* MEMS — cantilevers, bulk Si micromachining, surface micromachining
! Other Links:
* Quantum devices — transmon qubits, superconducting resonators
|-
* Organic / OLED — small-molecule OLEDs, perovskite solar cells
| style="background-color:#fef9e7;" |
 
* [[Lithography]]
'''→ [[User:YOURUSERNAME/sandbox/Workflows|Go to Process Workflows]]'''
* [[Deposition]]
* [[Dry Etch]]
* [[Wet Process]]
* [[Metrology]]
| style="background-color:#f4ebff;" |
* [[Bio-MEMS]]
* [[Photonics]]
* [[MEMS]]
* [[Quantum Devices]]
* [[Organic / OLED]]
| style="background-color:#eafaf1;" |
* [[Lithography (Recipes)|Lithography]]
* [[Deposition]]
* [[Dry Etch]]
|
* [[Process Control Data]]
* [[Tutorials]]
| style="background-color:#fafbe5;" |
* [https://anff-qld.org.au/ ANFF]
* [https://cmm.centre.uq.edu.au/ CMM]
|}


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=== [[User:YOURUSERNAME/sandbox/Equipment|Equipment]] ===
=== Events, Workshops & Forums ===


Full catalogue of instruments available at microQ, organised by process category. Each entry includes a description, key specifications, available materials, substrate sizes, and contact information for the responsible staff member. Categories include:
[[File:Flyer2026_4p3.png|thumb|center|500px|Flyer 2026]]


* Deposition — e-beam evaporation, sputtering, ALD, oxidation furnace
Upcoming training workshops, user forums, facility open days, and short courses. This page also archives past event materials including presentation slides and tutorial notes.
* Etching — DRIE, RIE, XeF₂ etcher
* Lithography — mask aligner, maskless aligner, hot embosser, Nanoscribe, MPO100
 
'''→ [[User:YOURUSERNAME/sandbox/Equipment|Go to Equipment]]''' <span style="color:#888;">''(coming soon)''</span>


'''→ [[Go to Events & Workshops]]''' <span style="color:#888;">''(coming soon)''</span>
----
----
=== [[User:YOURUSERNAME/sandbox/SOPs|Standard Operating Procedures]] ===
Detailed step-by-step operating procedures for each instrument, written for trained users. SOPs cover safety requirements, startup and shutdown sequences, process parameters, and troubleshooting guides. All users must read the relevant SOP before operating any tool independently.
'''→ [[User:YOURUSERNAME/sandbox/SOPs|Go to Standard Operating Procedures]]''' <span style="color:#888;">''(coming soon)''</span>
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=== [[User:YOURUSERNAME/sandbox/Booking|Booking Guide]] ===
{| style="background-color:#d9f2e6; width:100%; padding:8px; border:1px solid #c3e6cb;"
|
|


Everything you need to know about getting access to microQ tools. This includes how to create a RIMS account, complete induction training, request tool access, book time slots, and understand fair-use and billing policies.
{| style="background-color:#8cd9b3; width:100%; padding:8px; border:1px solid #c3e6cb;"
|-
| '''News & Announcements'''
|}
''News from [µQ].''


'''→ [[User:YOURUSERNAME/sandbox/Booking|Go to Booking Guide]]''' <span style="color:#888;">''(coming soon)''</span>
=== µQ Wikipedia ===
It is with great pleasure that we announce the official launch of our internal Wiki platform. Through the hard work of our team and key assistance from ITS, we have successfully established a self-hosted MediaWiki instance at UQ. Enjoy exploring the page and utilizing these centralized resources!


----
// [[User:YourUsername|Fernando Gottardo]] 13:35, 26 October 2026 (CEST)
 
|}
=== [[User:YOURUSERNAME/sandbox/Events|Events, Workshops & Forums]] ===
 
Upcoming training workshops, user forums, facility open days, and short courses. This page also archives past event materials including presentation slides and tutorial notes.
 
'''→ [[User:YOURUSERNAME/sandbox/Events|Go to Events & Workshops]]''' <span style="color:#888;">''(coming soon)''</span>
 
----


== Contact ==
== Contact ==
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| General enquiries || microq@uq.edu.au
| General enquiries || microq@uq.edu.au
|-
|-
| ANFF-Q instruments || Kai-Yu Liu
| ANFF-Q instruments || anff@uq.edu.au
|-
|-
| EBL / CMM || Contact CMM directly via RIMS
| EBL / CMM || cmm@uq.edu.au
|-
|-
| Organic / OLED (COPE) || Contact SCMB
| Organic / OLED (COPE) || Contact SCMB
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# Create or log in to your Wikipedia account
# Create or log in to your Wikipedia account
# Navigate to the relevant subpage (e.g. <code>User:YOURUSERNAME/sandbox/Workflows</code>)
# Navigate to the relevant subpage
# Click '''Edit''' and make your changes
# Click '''Edit''' and make your changes
# Add a brief summary of your edit in the Edit summary box
# Add a brief summary of your edit in the Edit summary box

Latest revision as of 16:15, 26 October 2026


Template:Hatnote

microQ — Queensland Nanofabrication Facility
A shared user facility at The University of Queensland providing access to state-of-the-art micro and nanofabrication tools, cleanroom infrastructure, and expert support for researchers across engineering, physics, chemistry, and the life sciences.

About This Wiki

This wiki is the central knowledge base for microQ users. Here you will find everything you need to plan, book, and execute your fabrication projects — from understanding which tools are available, to step-by-step process workflows, standard operating procedures, and upcoming training events.

If you are new to the facility, start with the Booking Guide to understand how to get access, then browse the Process Workflows to see how your device type maps to our available tools.

Our Purpose

microQ exists to make micro and nanofabrication accessible to the broadest possible research community at UQ and beyond. Our mission is to:

  • Provide open access to cutting-edge fabrication and characterisation equipment
  • Support researchers with expert technical staff and detailed process documentation
  • Foster collaboration across disciplines and institutions
  • Train the next generation of micro and nanofabrication scientists and engineers

Whether you are fabricating MEMS sensors, photonic integrated circuits, quantum devices, microfluidic chips, or organic electronics, microQ has the tools and expertise to support your work.

Location and Facilities

microQ infrastructure is distributed across several UQ sites. Each site specialises in different process capabilities.

Site Building Campus Specialisation
ANFF-Q AIBN (Bldg #75) St Lucia Lithography, deposition, etching, characterisation
CMM Hawken (Bldg #50) St Lucia Electron beam lithography, electron microscopy, surface analysis
SMP Parnell (Bldg #7) St Lucia Superconducting device fabrication, low-temperature deposition
Long Pocket Pandanus (Bldg #1022) Long Pocket Soft lithography, microfluidics, oxidation furnace
COPE SCMB St Lucia Organic electronics, OLEDs, perovskite devices

Create Access Guide!!!.

Quick Navigation

The sections below give a brief overview of each knowledge area. Click the link to go to the full subpage.

Equipment Info Process Flow Recipes + Processes Data + Info Other Links:

Events, Workshops & Forums

Flyer 2026

Upcoming training workshops, user forums, facility open days, and short courses. This page also archives past event materials including presentation slides and tutorial notes.

→ Go to Events & Workshops (coming soon)

News & Announcements

News from [µQ].

µQ Wikipedia

It is with great pleasure that we announce the official launch of our internal Wiki platform. Through the hard work of our team and key assistance from ITS, we have successfully established a self-hosted MediaWiki instance at UQ. Enjoy exploring the page and utilizing these centralized resources!

// Fernando Gottardo 13:35, 26 October 2026 (CEST)

Contact

Role Contact
General enquiries microq@uq.edu.au
ANFF-Q instruments anff@uq.edu.au
EBL / CMM cmm@uq.edu.au
Organic / OLED (COPE) Contact SCMB

For urgent facility issues during operating hours, contact the relevant site directly.

How to Contribute to This Wiki

This wiki is maintained by microQ staff and trained users. If you would like to contribute a workflow, add an SOP, or correct an error:

  1. Create or log in to your Wikipedia account
  2. Navigate to the relevant subpage
  3. Click Edit and make your changes
  4. Add a brief summary of your edit in the Edit summary box
  5. Click Publish changes

For major additions or structural changes, please discuss with microQ staff first.

Retrieved from "https://wiki.cmm.uq.edu.au/index.php?title=Main_Page&oldid=43"