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{{DISPLAYTITLE:microQ — Queensland Nanofabrication Facility}}
{{DISPLAYTITLE:microQ — Queensland Nanofabrication Facility}}
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Whether you are fabricating MEMS sensors, photonic integrated circuits, quantum devices, microfluidic chips, or organic electronics, microQ has the tools and expertise to support your work.
Whether you are fabricating MEMS sensors, photonic integrated circuits, quantum devices, microfluidic chips, or organic electronics, microQ has the tools and expertise to support your work.
----
== History ==
microQ grew out of the Australian National Fabrication Facility Queensland Node (ANFF-Q), established as part of the national ANFF network to provide shared fabrication infrastructure to Australian researchers. Over time the facility expanded its scope, tools, and user base, becoming a hub for collaborative nanofabrication research across UQ's faculties and partner institutions.
Today microQ operates cleanroom spaces across multiple UQ campuses, housing tools for lithography, deposition, etching, characterisation, and more.


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All sites operate under cleanroom conditions. Access requirements vary by site — see the [[User:YOURUSERNAME/sandbox/Booking|Booking Guide]] for details.
== Create [[User:YOURUSERNAME/sandbox/Booking|Access Guide!!!]].==
 


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The sections below give a brief overview of each knowledge area. Click the link to go to the full subpage.
The sections below give a brief overview of each knowledge area. Click the link to go to the full subpage.


=== [[User:YOURUSERNAME/sandbox/Workflows|Process Workflows]] ===
{| style="width:100%; background-color:#fafafa;" cellpadding="8"
 
|- style="background-color:#d4e6f1;"
Step-by-step fabrication guides organised by device type. Each workflow shows the recommended sequence of tools and facilities, typical process parameters, and tips for common pitfalls. Currently covers:
! Equipment Info
 
! Process Flow
* Bio-MEMS — microfluidics, PDMS soft lithography, hot embossing, bio-optomechanical devices
! Recipes + Processes
* Photonics — silicon photonics, metalenses, plasmonic nanostructures
! Data + Info
* MEMS — cantilevers, bulk Si micromachining, surface micromachining
! Other Links:
* Quantum devices — transmon qubits, superconducting resonators
|-
* Organic / OLED — small-molecule OLEDs, perovskite solar cells
| style="background-color:#fef9e7;" |
 
* [[Lithography]]
'''→ [[User:YOURUSERNAME/sandbox/Workflows|Go to Process Workflows]]'''
* [[Deposition]]
* [[Dry Etch]]
* [[Wet Process]]
* [[Metrology]]
| style="background-color:#f4ebff;" |
* [[Bio-MEMS]]
* [[Photonics]]
* [[MEMS]]
* [[Quantum Devices]]
* [[Organic / OLED]]
| style="background-color:#eafaf1;" |
* [[Lithography (Recipes)|Lithography]]
* [https://wiki.nanofab.ucsb.edu/wiki/Tool_List#Lithography Deposition]
* [[Dry Etch]]
|  
* [[Process Control Data]]
* [[Tutorials]]
| style="background-color:#fafbe5;" |
* [https://anff-qld.org.au/ ANFF]
* [https://cmm.centre.uq.edu.au/ CMM]
|}


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----


=== [[User:YOURUSERNAME/sandbox/Equipment|Equipment]] ===
=== [[User:YOURUSERNAME/sandbox/Events|Events, Workshops & Forums]] ===


Full catalogue of instruments available at microQ, organised by process category. Each entry includes a description, key specifications, available materials, substrate sizes, and contact information for the responsible staff member. Categories include:
<html>
<div style="text-align:center;">
<a href="/wiki/images/b/be/Workshop.pdf" target="_blank">
<img src="/wiki/images/0/0a/Poster_thumbnail.png" width="400" style="border:1px solid #ccc; padding:5px;">
</a>
<br>
<b>Click to view the full poster (PDF)</b>
</div>
</html>


* Deposition — e-beam evaporation, sputtering, ALD, oxidation furnace
Upcoming training workshops, user forums, facility open days, and short courses. This page also archives past event materials including presentation slides and tutorial notes.
* Etching — DRIE, RIE, XeF₂ etcher
* Lithography — mask aligner, maskless aligner, hot embosser, Nanoscribe, MPO100
 
'''→ [[User:YOURUSERNAME/sandbox/Equipment|Go to Equipment]]''' <span style="color:#888;">''(coming soon)''</span>


'''→ [[User:YOURUSERNAME/sandbox/Events|Go to Events & Workshops]]''' <span style="color:#888;">''(coming soon)''</span>
----
----
=== [[User:YOURUSERNAME/sandbox/SOPs|Standard Operating Procedures]] ===
Detailed step-by-step operating procedures for each instrument, written for trained users. SOPs cover safety requirements, startup and shutdown sequences, process parameters, and troubleshooting guides. All users must read the relevant SOP before operating any tool independently.
'''→ [[User:YOURUSERNAME/sandbox/SOPs|Go to Standard Operating Procedures]]''' <span style="color:#888;">''(coming soon)''</span>
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----


=== [[User:YOURUSERNAME/sandbox/Booking|Booking Guide]] ===
{| style="background-color:#d9f2e6; width:100%; padding:8px; border:1px solid #c3e6cb;"
|
|


Everything you need to know about getting access to microQ tools. This includes how to create a RIMS account, complete induction training, request tool access, book time slots, and understand fair-use and billing policies.
{| style="background-color:#8cd9b3; width:100%; padding:8px; border:1px solid #c3e6cb;"
|-
| '''News & Announcements'''
|}
''News from [µQ].''


'''→ [[User:YOURUSERNAME/sandbox/Booking|Go to Booking Guide]]''' <span style="color:#888;">''(coming soon)''</span>
=== Micro and Nano Fabrication Expansion ===
With great pleasure, we announce the expansion of our facility's capabilities. Construction of a new building has been approved and will commence next week. Our new cleanroom will feature 5,000 m<sup>2</sup> of floor space and will be equipped with an extensive range of new tools (including a coffee machine).


----
// [[User:YourUsername|Fernando Gottardo]] 05:08, 16 June 2026 (CEST)


=== [[User:YOURUSERNAME/sandbox/Events|Events, Workshops & Forums]] ===
=== Most recent prize awards ===
We are thrilled to announce that one of our staff members has been honored with the most prestigious award in science! The Nobel Prize in Medicine was awarded to our colleague for developing a unique, full-body silicon photonics chamber. This innovative system uses on-chip ion-trapping structures to completely eliminate all viruses and cancer cells in just a 180-second scan. For more information, check out this [link](https://physicsworld.com/a/ion-based-commercial-quantum-computer-is-a-first/) and the [video](https://www.youtube.com/shorts/fCx__qCtSI4) of the Nobel Prize ceremony.


Upcoming training workshops, user forums, facility open days, and short courses. This page also archives past event materials including presentation slides and tutorial notes.
* Bullet point one
* Bullet point two


'''→ [[User:YOURUSERNAME/sandbox/Events|Go to Events & Workshops]]''' <span style="color:#888;">''(coming soon)''</span>
// [[User:YourUsername|Fernando Gottardo]] 05:08, 16 June 2026 (CEST)


----
|}


== Contact ==
== Contact ==

Revision as of 09:09, 26 October 2026


Template:Hatnote

microQ — Queensland Nanofabrication Facility
A shared user facility at The University of Queensland providing access to state-of-the-art micro and nanofabrication tools, cleanroom infrastructure, and expert support for researchers across engineering, physics, chemistry, and the life sciences.

About This Wiki

This wiki is the central knowledge base for microQ users. Here you will find everything you need to plan, book, and execute your fabrication projects — from understanding which tools are available, to step-by-step process workflows, standard operating procedures, and upcoming training events.

If you are new to the facility, start with the Booking Guide to understand how to get access, then browse the Process Workflows to see how your device type maps to our available tools.

Our Purpose

microQ exists to make micro and nanofabrication accessible to the broadest possible research community at UQ and beyond. Our mission is to:

  • Provide open access to cutting-edge fabrication and characterisation equipment
  • Support researchers with expert technical staff and detailed process documentation
  • Foster collaboration across disciplines and institutions
  • Train the next generation of micro and nanofabrication scientists and engineers

Whether you are fabricating MEMS sensors, photonic integrated circuits, quantum devices, microfluidic chips, or organic electronics, microQ has the tools and expertise to support your work.

Location and Facilities

microQ infrastructure is distributed across several UQ sites. Each site specialises in different process capabilities.

Site Building Campus Specialisation
ANFF-Q AIBN (Bldg #75) St Lucia Lithography, deposition, etching, characterisation
CMM Hawken (Bldg #50) St Lucia Electron beam lithography, electron microscopy, surface analysis
SMP Parnell (Bldg #7) St Lucia Superconducting device fabrication, low-temperature deposition
Long Pocket Pandanus (Bldg #1022) Long Pocket Soft lithography, microfluidics, oxidation furnace
COPE SCMB St Lucia Organic electronics, OLEDs, perovskite devices

Create Access Guide!!!.

Quick Navigation

The sections below give a brief overview of each knowledge area. Click the link to go to the full subpage.

Equipment Info Process Flow Recipes + Processes Data + Info Other Links:

Events, Workshops & Forums

<html>

<a href="/wiki/images/b/be/Workshop.pdf" target="_blank"> <img src="/wiki/images/0/0a/Poster_thumbnail.png" width="400" style="border:1px solid #ccc; padding:5px;"> </a>
Click to view the full poster (PDF)

</html>

Upcoming training workshops, user forums, facility open days, and short courses. This page also archives past event materials including presentation slides and tutorial notes.

→ Go to Events & Workshops (coming soon)

News & Announcements

News from [µQ].

Micro and Nano Fabrication Expansion

With great pleasure, we announce the expansion of our facility's capabilities. Construction of a new building has been approved and will commence next week. Our new cleanroom will feature 5,000 m2 of floor space and will be equipped with an extensive range of new tools (including a coffee machine).

// Fernando Gottardo 05:08, 16 June 2026 (CEST)

Most recent prize awards

We are thrilled to announce that one of our staff members has been honored with the most prestigious award in science! The Nobel Prize in Medicine was awarded to our colleague for developing a unique, full-body silicon photonics chamber. This innovative system uses on-chip ion-trapping structures to completely eliminate all viruses and cancer cells in just a 180-second scan. For more information, check out this [link](https://physicsworld.com/a/ion-based-commercial-quantum-computer-is-a-first/) and the [video](https://www.youtube.com/shorts/fCx__qCtSI4) of the Nobel Prize ceremony.

  • Bullet point one
  • Bullet point two

// Fernando Gottardo 05:08, 16 June 2026 (CEST)

Contact

Role Contact
General enquiries microq@uq.edu.au
ANFF-Q instruments Kai-Yu Liu
EBL / CMM Contact CMM directly via RIMS
Organic / OLED (COPE) Contact SCMB

For urgent facility issues during operating hours, contact the relevant site directly.

How to Contribute to This Wiki

This wiki is maintained by microQ staff and trained users. If you would like to contribute a workflow, add an SOP, or correct an error:

  1. Create or log in to your Wikipedia account
  2. Navigate to the relevant subpage (e.g. User:YOURUSERNAME/sandbox/Workflows)
  3. Click Edit and make your changes
  4. Add a brief summary of your edit in the Edit summary box
  5. Click Publish changes

For major additions or structural changes, please discuss with microQ staff first.

Retrieved from "https://wiki.cmm.uq.edu.au/index.php?title=Main_Page&oldid=7"