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[[File:Flyer2026_4p3.png|thumb|center|500px|Flyer 2026]] | |||
Upcoming training workshops, user forums, facility open days, and short courses. This page also archives past event materials including presentation slides and tutorial notes. | Upcoming training workshops, user forums, facility open days, and short courses. This page also archives past event materials including presentation slides and tutorial notes. | ||
'''→ [[ | '''→ [[Go to Events & Workshops]]''' <span style="color:#888;">''(coming soon)''</span> | ||
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Revision as of 09:32, 26 October 2026
| microQ — Queensland Nanofabrication Facility |
| A shared user facility at The University of Queensland providing access to state-of-the-art micro and nanofabrication tools, cleanroom infrastructure, and expert support for researchers across engineering, physics, chemistry, and the life sciences. |
About This Wiki
This wiki is the central knowledge base for microQ users. Here you will find everything you need to plan, book, and execute your fabrication projects — from understanding which tools are available, to step-by-step process workflows, standard operating procedures, and upcoming training events.
If you are new to the facility, start with the Booking Guide to understand how to get access, then browse the Process Workflows to see how your device type maps to our available tools.
Our Purpose
microQ exists to make micro and nanofabrication accessible to the broadest possible research community at UQ and beyond. Our mission is to:
- Provide open access to cutting-edge fabrication and characterisation equipment
- Support researchers with expert technical staff and detailed process documentation
- Foster collaboration across disciplines and institutions
- Train the next generation of micro and nanofabrication scientists and engineers
Whether you are fabricating MEMS sensors, photonic integrated circuits, quantum devices, microfluidic chips, or organic electronics, microQ has the tools and expertise to support your work.
Location and Facilities
microQ infrastructure is distributed across several UQ sites. Each site specialises in different process capabilities.
| Site | Building | Campus | Specialisation |
|---|---|---|---|
| ANFF-Q | AIBN (Bldg #75) | St Lucia | Lithography, deposition, etching, characterisation |
| CMM | Hawken (Bldg #50) | St Lucia | Electron beam lithography, electron microscopy, surface analysis |
| SMP | Parnell (Bldg #7) | St Lucia | Superconducting device fabrication, low-temperature deposition |
| Long Pocket | Pandanus (Bldg #1022) | Long Pocket | Soft lithography, microfluidics, oxidation furnace |
| COPE | SCMB | St Lucia | Organic electronics, OLEDs, perovskite devices |
Create Access Guide!!!.
Quick Navigation
The sections below give a brief overview of each knowledge area. Click the link to go to the full subpage.
| Equipment Info | Process Flow | Recipes + Processes | Data + Info | Other Links: |
|---|---|---|---|---|
Events, Workshops & Forums
Upcoming training workshops, user forums, facility open days, and short courses. This page also archives past event materials including presentation slides and tutorial notes.
→ Go to Events & Workshops (coming soon)
News from [µQ]. Micro and Nano Fabrication ExpansionWith great pleasure, we announce the expansion of our facility's capabilities. Construction of a new building has been approved and will commence next week. Our new cleanroom will feature 5,000 m2 of floor space and will be equipped with an extensive range of new tools (including a coffee machine). // Fernando Gottardo 05:08, 16 June 2026 (CEST) Most recent prize awardsWe are thrilled to announce that one of our staff members has been honored with the most prestigious award in science! The Nobel Prize in Medicine was awarded to our colleague for developing a unique, full-body silicon photonics chamber. This innovative system uses on-chip ion-trapping structures to completely eliminate all viruses and cancer cells in just a 180-second scan. For more information, check out this [link](https://physicsworld.com/a/ion-based-commercial-quantum-computer-is-a-first/) and the [video](https://www.youtube.com/shorts/fCx__qCtSI4) of the Nobel Prize ceremony.
// Fernando Gottardo 05:08, 16 June 2026 (CEST) |
Contact
| Role | Contact |
|---|---|
| General enquiries | microq@uq.edu.au |
| ANFF-Q instruments | Kai-Yu Liu |
| EBL / CMM | Contact CMM directly via RIMS |
| Organic / OLED (COPE) | Contact SCMB |
For urgent facility issues during operating hours, contact the relevant site directly.
How to Contribute to This Wiki
This wiki is maintained by microQ staff and trained users. If you would like to contribute a workflow, add an SOP, or correct an error:
- Create or log in to your Wikipedia account
- Navigate to the relevant subpage (e.g.
User:YOURUSERNAME/sandbox/Workflows) - Click Edit and make your changes
- Add a brief summary of your edit in the Edit summary box
- Click Publish changes
For major additions or structural changes, please discuss with microQ staff first.
