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microQ — Queensland Nanofabrication Facility

A shared user facility at The University of Queensland providing access to state-of-the-art micro and nanofabrication tools, cleanroom infrastructure, and expert support for researchers across engineering, physics, chemistry, and the life sciences.

About This Wiki

This wiki is the central knowledge base for microQ users. Here you will find everything you need to plan, book, and execute your fabrication projects — from understanding which tools are available, to step-by-step process workflows, standard operating procedures, and upcoming training events.

If you are new to the facility, start with the Booking Guide to understand how to get access, then browse the Process Workflows to see how your device type maps to our available tools.

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Our Purpose

microQ exists to make micro and nanofabrication accessible to the broadest possible research community at UQ and beyond. Our mission is to:

• Provide open access to cutting-edge fabrication and characterisation equipment
• Support researchers with expert technical staff and detailed process documentation
• Foster collaboration across disciplines and institutions
• Train the next generation of micro and nanofabrication scientists and engineers

Whether you are fabricating MEMS sensors, photonic integrated circuits, quantum devices, microfluidic chips, or organic electronics, microQ has the tools and expertise to support your work.

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Location and Facilities

microQ infrastructure is distributed across several UQ sites. Each site specialises in different process capabilities.

Site	Building	Campus	Specialisation
ANFF-Q	AIBN (Bldg #75)	St Lucia	Lithography, deposition, etching, characterisation
CMM	Hawken (Bldg #50)	St Lucia	Electron beam lithography, electron microscopy, surface analysis
SMP	Parnell (Bldg #7)	St Lucia	Superconducting device fabrication, low-temperature deposition
Long Pocket	Pandanus (Bldg #1022)	Long Pocket	Soft lithography, microfluidics, oxidation furnace
COPE	SCMB	St Lucia	Organic electronics, OLEDs, perovskite devices

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Quick Navigation

The sections below give a brief overview of each knowledge area. Click the link to go to the full subpage.

Equipment Info	Process Flow	Recipes + Processes	Data + Info	Other Links:
Lithography Deposition Dry Etch Wet Process Metrology	Bio-MEMS Photonics MEMS Quantum Devices Organic / OLED	Lithography Deposition Dry Etch	Process Control Data Tutorials	ANFF CMM

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Events, Workshops & Forums

Flyer 2026

Upcoming training workshops, user forums, facility open days, and short courses. This page also archives past event materials including presentation slides and tutorial notes.

→ Go to Events & Workshops (coming soon)

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News & Announcements News from [µQ]. µQ Wikipedia It is with great pleasure that we announce the official launch of our internal Wiki platform. Through the hard work of our team and key assistance from ITS, we have successfully established a self-hosted MediaWiki instance at UQ. Enjoy exploring the page and utilizing these centralized resources! // Fernando Gottardo 13:35, 26 October 2026 (CEST)

Contact

Role	Contact
General enquiries	microq@uq.edu.au
ANFF-Q instruments	anff@uq.edu.au
EBL / CMM	cmm@uq.edu.au
Organic / OLED (COPE)	Contact SCMB

For urgent facility issues during operating hours, contact the relevant site directly.

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How to Contribute to This Wiki

This wiki is maintained by microQ staff and trained users. If you would like to contribute a workflow, add an SOP, or correct an error:

1. Create or log in to your Wikipedia account
2. Navigate to the relevant subpage
3. Click Edit and make your changes
4. Add a brief summary of your edit in the Edit summary box
5. Click Publish changes

For major additions or structural changes, please discuss with microQ staff first.

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